“For lithography and other harsh environment realize multidimensional interference measurement requirements, we put forward is based on the analysis of the prism error vector monomer component design method of integrated multi-axis interferometer developed from 2 to 5 axis series multi-axis interferometer component monomer type, broke the monopoly of foreign enterprises and export restrictions to our country.” Li yan, a professor at tsinghua university and director of the academic committee of the department of precision instruments, told reporters Thursday.
Laser interferometry is one of the most effective means to realize ultra-precision measurement and control and micro-nano scale measurement. Under the support of the national major science and technology project of “maximum scale integrated circuit manufacturing equipment and complete process” (02 special project), the project of “high velocity multi-axis high resolution lasaer pointer interferometry technology and instrument”, completed by li yan and others, has broken through a series of key technical bottlenecks and formed a new measurement method, system and instrument.
Li yan introduced that the project has realized the high velocity measurement, multi-axis large range and high resolution laser interferometry system developed by self-development of the whole chain from interferometer components, signal detection and demodulation to multi-dof detection scheme design.
So far, the project team of research and development of lithography with double-frequency laser interferometer system, applied to the research in our country lithography mechanic in the process of research and development of a prototype, the cumulative application more than 50 sets, meet the precision of lithography double prototype workpiece measurement requirements, reduce the dependence on foreign high-end interferometer, reduces the product research and development of risk on China’s export restrictions.
Li yan said, such as the development of nanometer resolution traceable heterodyne interferometer, the multidimensional measurement system used in laser research and development of comparison test study, find out the reason of the laser multidimensional nonlinear error measuring system, and using special circuits to correction, improve the performance of a laser multidimensional measurement system, the proposed new method traceable interferometry, as Moore unit adopts the avogadro constant redefine made contributions.
“The success of the project breaks the restriction and monopoly of foreign countries on China’s high-end laser interferometry instruments, and provides stable performance for China’s high-end equipment and instrument research and development, which is not subject to foreign measurement and traceability ability, enriching the theory and technology of laser interferometry, which has very important technical, economic and social benefits.” Li yan said.