The openness of the algorithm and packaging with hardware can reduce the repeated investment of car companies and thus reduce the cost of lidar. From the perspective of hardware, MEMS micro-mirrors can not only reduce costs, but also reduce the volume of laser pointer radar. He Wei, person in charge of Xi’an Zhiwei Sensing Market, also said at the meeting: “Lidar can be divided into mechanical scanning type, MEMS scanning type, Flash, OPA. Among them, the mechanical type is relatively large. It is considered as an unmanned weather vane. At CES2018, half of the world’s more than 10 participating lidar manufacturers launched a new generation of Lidar based on MEMS technology, including Innolle / Infineon, Aeye, LeddarTech, Sagitar, Pioneer, INNOVIZ. ”
It can be seen that LiDAR based on MEMS technology has been recognized by the industry, and can be industrialized in a short time and promote the development of autonomous driving. It is understood that there are currently 1D MEMS and 2D MEMS lidars, but MEMS lidars need to use MEMS micro-mirrors as deflection elements for pulsed lasers. As for what is a MEMS micro-mirror? He Wei explained: “MEMS micro-mirror is a miniaturized galvanometer. When the mirror is working, it can swing at high speed and scan the laser direction. The galvanometer is divided into electromagnetic, electrostatic and electrothermal drive according to different driving methods. What we do is The advantage of electrostatic drive is that the production process is relatively simple. Unlike electromagnetic drive, which requires assembly, the volume is relatively small and the integration is the highest. “It should also be pointed out that MEMS galvanometer mirrors are only the size of rice grains, and can be obtained through wafer-level packaging. Achieve higher integration to achieve a smaller size. Lidars using MEMS micromirrors not only reduce the volume significantly compared to traditional mechanical lidars, but also reduce the cost of laser pointers.