Keyi Hongyuan has three main products, namely 193nm excimer laser for lithography, 248nm excimer laser for lithography and 193nm excimer laser for immersion. This company has mastered the core technology of a 193nm excimer lithography light source with a repetition rate of 4kHz and has developed a principle prototype. This type of stereotyped light source products are mainly used in lithography machines at nodes below 90nm and 65nm. Such lithography machines occupy a major position and gradually occupy more markets in more i-Line upgrade areas. With the continuous advancement of Industry 4.0, more chips used in the field of industrial intelligence will be completed by 90nm lithography machines. The technical basis of 248nm products has a strong correlation with 193nm, the technical difficulty is small, the development cost is low, and the cycle is faster. Only minor changes in cavity design and optical design can be completed to quickly develop green laser pointer product development ,Bring to market.
It is understood that Beijing Keyi Hongyuan Optoelectronics Technology Co., Ltd. was established in July 2016 with a registered capital of 120 million yuan, relying on the technological foundation of the Chinese Academy of Sciences Optoelectronics Institute and the Institute of Microelectronics of the shareholder unit, and the industries of Yizhuang SDIC and SIG And capital forces, committed to creating independent innovative enterprises, to meet the needs of the country and the market with excimer laser technology and products with independent intellectual property rights. Keyi Hongyuan is the carrier of the industrialization of the achievements of the National 02 major special project “Development of submerged exposure light sources and construction of small-volume product production capacity”. It is also an example of the transformation of the green laser pointer of the “three cities and one district” scientific and technological innovation achievement.